Apparently first EUV prototypes were shipped to TSMC for R&D in 2010(!). ASML ha... | Hacker News

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Apparently first EUV prototypes were shipped to TSMC for R&D in 2010(!).

ASML has a timeline of the company and technology development[1].

[1]https://www.asml.com/en/company/about-asml/history

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