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That’s amazing - now I have questions.

They say “decades in the making” - when did it first become viable, and then how long to master the process and become confident enough to mass produce consumer goods from it? I’d love to see a timeline w milestones.




Apparently first EUV prototypes were shipped to TSMC for R&D in 2010(!).

ASML has a timeline of the company and technology development[1].

[1]https://www.asml.com/en/company/about-asml/history




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