Thanks for pointing that out. Yes, the $1mm number I cited in my post is the estimated raw cost of a full mask set for a relatively modern process in the 2Xnm or smaller range.
Definitely older processes have much cheaper mask sets -- in part because there are just fewer metal layers, and fewer & cheaper masks required to image the transistors when the wavelength of light used (193nm) is close to the line width of the devices themselves.
Definitely older processes have much cheaper mask sets -- in part because there are just fewer metal layers, and fewer & cheaper masks required to image the transistors when the wavelength of light used (193nm) is close to the line width of the devices themselves.