> Trying to trace things like this is a fools errand though. Trace things back further than that, the microscope was invented in Europe
Regardless of what other prior inventions it depended on, EUV technology itself was invented in the US, and we know that factually - it’s not a fool’s errand. ASML literally approached the US government for a chance to license the technology. This was in the late 90s. That’s not to take away the work ASML has done since then to make it commercially viable through their machines (or TSMC in implementing and integrating ASML machines).
Regardless of what other prior inventions it depended on, EUV technology itself was invented in the US, and we know that factually - it’s not a fool’s errand. ASML literally approached the US government for a chance to license the technology. This was in the late 90s. That’s not to take away the work ASML has done since then to make it commercially viable through their machines (or TSMC in implementing and integrating ASML machines).